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Method for formining nanoscale features

Organization:University of MIchigan, MI, US
I.P. Brief:A versitile technique for machining nanometer-scale features using tightly-focused ultarshort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of materials.
Summary of I.P.:Using femtosecond laser machining techniques, we demonstrated the unique capability to create arbitrary surface or 3D subsurface features, including nanofluidic channel networks within glass substrates. This is a powerful enabling technology that simultaneously overcomes the limitations of traditional 2D lithography as well as the significant materials limitations of multilayer soft lithography methods, making extremely high device density and new capabilities possible. This technology could enable key applications such as chip-based biochemical analysis and drug delivery that have heretofore been impossible to achieve in glass substrates at practical device densities. We have already demonstrated 3D nanofluidic \"jumpers\", complex 3D channel geometries, and a rapid mixer and a nano-Capillary Electrophoresis system. We hope to extend this work to development of multiplexed nano-Capillary Electrochromatography and nano-HPLC systems by coating these nanochannels with appropriate derivatizations. This has potential to remove a number of serious roadblocks facing microfluidic clinical point-of-care testing technologies and enable the invention of entirely new implantable drug delivery systems. The technology enables three-dimensional microfluidic engineering with unprecedented flexibility and precision, and enables high-device-density complex microfludic devices.
Patent:\
Keywords:laser nanomachining microfluidics nanofluidics diagnostics microTAS
Primary Industry:Health & Medical Devices
Specific Market:Biomedical diagnostics and analysis
Market Size:There are other areas one can envision applying this technology, but focusing on medical applications the entire medical diagnostics market is $20-22 billion, with over 30% spent on immune assays.
State of the Art:ELISA and immune assays.
Figures of Merit:This technology enables 3D nanoscale machining and direct write nanolithography, applying a relatively easy to use and material-independent optical technique.
Tech.  Obstacles:Device design and manufacturing protocols must be developed and optimized. Accelerated processing is a particularly important challange.
Market Obstacles:1) identify greatest value-added application of this platform technology. 2) develop manufacturing protocols suited to specific applications.
Publications:1) Uram, J.D., Ke, K., Hunt, A.J. and Mayer, M. (2006) Label-free Affinity Assays by Rapid Detection of Immune Complexes using Submicron Pores. Angewandte Chemie, in press 2) Ke, K., Hasselbrink, E., Hunt, A.J. (2005) Rapidly-Prototyped Three-Dimensional Nanofluidic Channel Networks in Glass Substrates. Anal. Chem. 77(16):5083-5088 3) Ke, K, Hasselbrink, E, and Hunt , AJ. (2005) Nanofabrication with ultrafast lasers at critical intensity. Proceedings of SPIE 5074:53-62 4) Joglekar, A., Liu, H.H., Meyhöfer, E., Mourou, G., and A.J. Hunt. (2004) Optics at Critical Intensity: Applications to Nanomorphing. Proc. Natl. Acad. Sci. 101(16):5856-5861 5) Joglekar, A., Liu, H.H., Spooner, G.J., Meyhöfer, E., Mourou, G., and A.J. Hunt. (2003) A Study of the Deterministic Character of Optical Damage by Femtosecond Laser Pulses and Applications to Nanomachining. App. Phys. B. 77(1):25-30
Research Team:6 team members; two Ph.D. scientists, and 4 graduate students.

 

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