Surface Plasmon Enhanced Illumination
| Organization: | Office of Technology Development, Massachusetts, US | | I.P. Brief: | The Surface Plasmon Enhanced Illumination (“SPEI”) invention is a new way to produce an extremely small and extremely bright collimated light source. It has applications in lithography, optical data storage and biosensors. | | Keywords: | Semiconductors; Direct write photolithography; Optical data storage; Biosensors. | | Primary Industry: | Semiconductors; Optical data storage; Biosensors. | | Specific Market: | Products for photolithography, high density data storage and biosensors. |
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