VIGMA Nanoelectronics

Location:CA, US
Speaker:Yijian Chen
Title:Lithographic solutions for sub-32 nm semiconductor manufacturing
Primary Industry:Electronics
Executive Summary:VIGMA Nanoelectronic is an early-stage company founded by Dr. Yijian Chen in July 2006 in the state of California. VIGMA Nanoelectronics provides cost-effective lithographic technologies for the semiconductor industry to sustain functional device scaling beyond 32 nm node. The company is developing spatial-frequency tripling/quadrupling technology, post-lithography misalignment correction technique for double patterning, and programmable MEMS micromirror array for EUV maskless lithography. Frequency doubling/tripling and post-lithography misalignment correction technologies will be cost-effective methods enabling chip manufacturing for several generations beyond 32 nm with currently existing lithographic tools. Micromirror-based EUV maskless lithography is ideal for low-volume applications such as ASIC, manufacturing flexibility improvement, and reduction of design-to-market time.
Venture is:Seed Level


Corporate Presentations:

  • Air Products
  • BASF
  • Eastman Kodak Company
  • Genzyme
  • Goodrich
  • Hewlett-Packard
  • Honda
  • Medtronic
  • Merck
  • Sanyo

Reserved Presentations:

  • ExxonMobil
  • IBM

Partnering Events:
(full access included)

Platinum Sponsor

University of Hawaii

Press Sponsor

Business Wire

Commercialization Partner



Invest Australia AzTE Technology Enterprises

Media Sponsors

(joint with Nanotech 2007) Nature
Red Herring

Supporting Organizations

Boston University
Midwest Research University Network


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