PRODUCTION OF MULTILAYER MICROCOMPONENTS BY THE SACRIFICIAL THICK LAYER METHOD
| Organization: | Université de Bordeaux, 33076, FR |
| I.P. Brief: | The invention relates to production of microcomponents comprising layers, each consisting in a material chosen from metals, ceramics… Two specific inks are deposited on a substrate in a predetermined pattern. The achieved microcomponent is obtained after complete consolidation of one ink layers and complete or partial removal of the other. |
| Keywords: | sacrificial layer, thick-film, thermal microactuator, microresistor, microchannels, piezoelectric devices, strain gauge, low-cost |
| Primary Industry: | Semiconductors |
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