Advanced Manufacturing, Electronics and Microsystems: TechConnect Briefs 2015Advanced Manufacturing, Electronics and Microsystems TechConnect Briefs 2015

Photonic Materials & Devices Chapter 5

Silicon Photonic Temeprature Sensors

Z. Ahmed
NIST, United States

pp. 157 - 159

Keywords: nanophotonics, temperature sensor, ring resonator, photonic crystal cavity

For the past century, industrial temperature measurements have relied on resistance measurement of a thin metal wire or filament whose resistance varies with temperature. Though resistance thermometers can routinely measure industrial temperatures with uncertainties of 10 mK, they are sensitive to mechanical shock which causes the sensor resistance to drift over time requiring frequent off-line, expensive, and time consuming calibrations. These fundamental limitations of resistance thermometry have produced considerable interest in developing photonic temperature sensors to leverage advances in frequency metrology and to achieve greater mechanical and environmental stability. The thermo-optics effect of silicon presents an inviting oppertunity for developing novel, high sensitivity temperature sensors. We are developing a suite of photonic devices such as on-chip Bragg waveguides, ring resonators and photonic crystal cavities that leverage advances in microwave and C-band light sources to fabricate cost-effective photonic temperature sensors. We have demonstrated that silicon ring resonator can detect temperature changes of >100 K