Advanced Manufacturing, Electronics and Microsystems: TechConnect Briefs 2015Advanced Manufacturing, Electronics and Microsystems TechConnect Briefs 2015

Photonic Materials & Devices Chapter 5

Wafer-scale photonic and plasmonic crystal sensors

M.C. George, J.-N. Liu, A. Farhang, B. Williamson, M. Black, T. Wangensteen, J. Fraser, R. Petrova, and B.T. Cunningham
Moxtek, United States

pp. 160 - 162

Keywords: photonic crystal, SPR sensor, nano-hole array, microarray, wafer-scale

This presentation will review recent results in 200 mm diameter wafer-scale fabrication, metrology, and optical modeling of various photonic and plasmonic crystal sensors, including 1D photonic crystals based on leaky-waveguide mode resonance, as well as 1D and 2D metallic arrays based on surface plasmon resonance, with potential applications in label free sensing, SERS, and surface-enhanced fluorescence spectroscopy (SEFS). Potential markets include micro-arrays for medical diagnostics, forensic testing, environmental monitoring, and food safety. Wafer-scale optical metrology results will be presented along with application-based performance results, including label free photonic crystal and SPR sensing of surface binding kinetics and bulk refractive index changes. In addition, surface enhanced Raman spectroscopy (SERS) of both 1D grating structures and 2D arrays will be presented. Challenges in the commercialization of photonic and plasmonic crystal sensors will also be discussed.