Advanced Manufacturing, Electronics and Microsystems: TechConnect Briefs 2015Advanced Manufacturing, Electronics and Microsystems TechConnect Briefs 2015

Modeling & Simulation of Microsystems Chapter 7

Modeling the effect of the increase in the actuation voltage on the dynamic behavior of a RF MEMS switch

M. Jamshidzadeh, J. Casals
Assistant Professor, Iran, Islamic Republic of

pp. 246 - 249

Keywords: index terms—RF-MEMS, stiction, capillary force, Casimire force, Van der Waals force, ohmic contact, charging contact

Abstract—In the past few years many reports have demonstrated the development of RF-MEMS switches considering the mechanical, electrical and chemical behaviors separately. However there are a few works which address the whole aspects of RF-MEMS in a single model. In this paper we present such a numerical model to characterize the dynamic behavior of RF-MEMS switches. The goal is to analyze the effect of an increase in the actuation voltage on the insertion losses of the RF switches. The numerical results will be compared to the experimental data obtained from previous prototypes.