Advanced Manufacturing, Electronics and Microsystems: TechConnect Briefs 2016Advanced Manufacturing, Electronics and Microsystems TechConnect Briefs 2016

Advanced Manufacturing Chapter 1

Nanofabrication with Lanthanum Hexaboride (LaB6) for Nanoscale Vacuum Electronics

M.N. Mankin, T.S. Pan
Modern Electron, United States

pp. 45 - 47

Keywords: lanthanum hexaboride, LaB6, low-loss grid, low fill factor grid, microfabrication, nanofabrication, low work function, vacuum electronic, field emission heat engine

We present the first nano- and microfabrication of vacuum microelectronic components incorporating lanthanum hexaboride (LaB6), a refractory low work function material with high electron emissivity. We design novel fabrication processes which yield ultra-low fill factor (