A. Rouzaud, JP. Polizzi, P. Robert, J. Arcamone
CEA LETI, France
pp. 294 - 299
Keywords: MEMS and NEMS, manufacturing platforms, silicon microtechnologies
Coming at the time of technical maturity, MEMS industry requires now more standardization in manufacturing processes. This paper presents Leti’s contribution to develop generic platforms matching the suitable MEMS technologies within two distinct fields: physical (i.e. inertial + pressure) and chemical applications. Given the different levels of maturity between physical and chemical sensors, two specific approaches have been considered. For mature physical sensors, the main industrial objective is to process all these components in a unified way, allowing to get combos (3 to 11 DoF) on single chips using a common process flow, resulting in a drastic cost, size and power consumption reduction. A generic technology platform has been developed accordingly, allowing simplified readout electronics, and fully compatible with CMOS fabrication. For less mature chemical and bio chemical sensors, Léti approach is based on ultra sensitive mass measurements using NEMS resonators. This generic technology based on CMOS-compatible techniques allows to co-integrate on a same silicon chip both a sensing element and a miniaturized GC column, leading to highly integrated multi-gas analyzing systems. This presentation will focus on describing the technologies involved in the platforms, and will give their today status, both at the R&D and industrial level.